Back to Search Start Over

Energetic Electron Beam Induced Recrystallization of Ion Implantation Damage in Semiconductors.

Authors :
Bench, M. W.
Robertson, I. M.
Kirk, M. A.
Source :
MRS Online Proceedings Library; 01/08/1992, Vol. 235, pN.PAG-1, 1p
Publication Year :
1992

Details

Language :
English
ISSN :
19464274
Volume :
235
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
86845284
Full Text :
https://doi.org/10.1557/PROC-235-27