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STRAIN MEASUREMENT IN EPITAXIAL NiSi2/Si(lll) BY MeV ION CHANNELING.

Authors :
OKAMOTO, MASAKO
HASHIMOTO, SHIN
HUNT, B.D.
SCHOWALTER, L.J.
GIBSON, W.M.
Source :
MRS Online Proceedings Library; 01/12/1985, Vol. 56, pN.PAG-1, 1p
Publication Year :
1985

Details

Language :
English
ISSN :
19464274
Volume :
56
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
86833051
Full Text :
https://doi.org/10.1557/PROC-56-157