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Properties of A—Sin:H Films Prepared by Glow Discharge of Si2H6—Nh3 Gas Mixture.

Authors :
Kojima, Y.
Narikawa, S.
Matsuyama, T.
Imada, E.
Nojima, H.
Hayakawa, T.
Ehara, S.
Source :
MRS Online Proceedings Library; 01/05/1985, Vol. 49, pN.PAG-1, 1p
Publication Year :
1985

Details

Language :
English
ISSN :
19464274
Volume :
49
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
86832549
Full Text :
https://doi.org/10.1557/PROC-49-203