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Refinement of low-resistance Ni–Ge–Au ohmic contacts to n+ GaAs using screening and response surface experiments.
- Source :
- Journal of Materials Research; 05/01/1996, Vol. 11 Issue 5, p1238-1243, 6p
- Publication Year :
- 1996
Details
- Language :
- English
- ISSN :
- 08842914
- Volume :
- 11
- Issue :
- 5
- Database :
- Complementary Index
- Journal :
- Journal of Materials Research
- Publication Type :
- Academic Journal
- Accession number :
- 86811059
- Full Text :
- https://doi.org/10.1557/JMR.1996.0158