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Optical accelerometer with mechanical amplification via a V-beam mechanism.

Authors :
Davies, Edward
George, David S.
Gower, Malcolm C.
Holmes, Andrew S.
Source :
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS); 1/ 1/2013, p609-612, 4p
Publication Year :
2013

Abstract

A method is reported for improving the performance of a Fabry-Pérot optical accelerometer, based on the use of a V-beam mechanism to amplify the proof mass displacement. Amplification allows the sensitivity to be increased without compromising bandwidth or requiring an increase in cavity finesse. An analytical expression relating the amplification factor to the V-beam length, width and angle was derived and used to produce a series of differently angled devices. A 1.9° device was capable of detecting accelerations from 0.01 to 10 g rms. The 1.33° accelerometer produced an amplification of 18.6 ± 6.4. [ABSTRACT FROM PUBLISHER]

Details

Language :
English
ISBNs :
9781467356541
Database :
Complementary Index
Journal :
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
Publication Type :
Conference
Accession number :
86598182
Full Text :
https://doi.org/10.1109/MEMSYS.2013.6474315