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Optical accelerometer with mechanical amplification via a V-beam mechanism.
- Source :
- 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS); 1/ 1/2013, p609-612, 4p
- Publication Year :
- 2013
-
Abstract
- A method is reported for improving the performance of a Fabry-Pérot optical accelerometer, based on the use of a V-beam mechanism to amplify the proof mass displacement. Amplification allows the sensitivity to be increased without compromising bandwidth or requiring an increase in cavity finesse. An analytical expression relating the amplification factor to the V-beam length, width and angle was derived and used to produce a series of differently angled devices. A 1.9° device was capable of detecting accelerations from 0.01 to 10 g rms. The 1.33° accelerometer produced an amplification of 18.6 ± 6.4. [ABSTRACT FROM PUBLISHER]
Details
- Language :
- English
- ISBNs :
- 9781467356541
- Database :
- Complementary Index
- Journal :
- 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
- Publication Type :
- Conference
- Accession number :
- 86598182
- Full Text :
- https://doi.org/10.1109/MEMSYS.2013.6474315