Resonant pressure sensor with on-chip temperature and strain sensors for error correction.

MLA

Chiang, Chia-Fang, et al. “Resonant Pressure Sensor with On-Chip Temperature and Strain Sensors for Error Correction.” 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), Jan. 2013, pp. 45–48. EBSCOhost, https://doi.org/10.1109/MEMSYS.2013.6474172.

APA

Chiang, C.-F., Graham, A. B., Lee, B. J., Ahn, C. H., Ng, E. J., O’Brien, G. J., & Kenny, T. W. (2013). Resonant pressure sensor with on-chip temperature and strain sensors for error correction. 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), 45–48. https://doi.org/10.1109/MEMSYS.2013.6474172

Chicago

Chiang, Chia-Fang, Andrew B. Graham, Brian J. Lee, Chae Hyuck Ahn, Eldwin J. Ng, Gary J. O’Brien, and Thomas W. Kenny. 2013. “Resonant Pressure Sensor with On-Chip Temperature and Strain Sensors for Error Correction.” 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), January, 45–48. doi:10.1109/MEMSYS.2013.6474172.