Cite
Low-power DRAM-compatible Replacement Gate High-k/Metal Gate stacks.
MLA
Ritzenthaler, R., et al. “Low-Power DRAM-Compatible Replacement Gate High-k/Metal Gate Stacks.” 2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC), Jan. 2012, pp. 242–45. EBSCOhost, https://doi.org/10.1109/ESSDERC.2012.6343378.
APA
Ritzenthaler, R., Schram, T., Bury, E., Mitard, J., Ragnarsson, L.-A., Groeseneken, G., Horiguchi, N., Thean, A., Spessot, A., Caillat, C., Srividya, V., & Fazan, P. (2012). Low-power DRAM-compatible Replacement Gate High-k/Metal Gate stacks. 2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC), 242–245. https://doi.org/10.1109/ESSDERC.2012.6343378
Chicago
Ritzenthaler, R., T. Schram, E. Bury, J. Mitard, L.-A. Ragnarsson, G. Groeseneken, N. Horiguchi, et al. 2012. “Low-Power DRAM-Compatible Replacement Gate High-k/Metal Gate Stacks.” 2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC), January, 242–45. doi:10.1109/ESSDERC.2012.6343378.