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A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators.
- Source :
- 2012 International Conference on Optical MEMS & Nanophotonics; 1/ 1/2012, p73-74, 2p
- Publication Year :
- 2012
-
Abstract
- A hybrid two-axis scanning micromirror combining electrostatic and electrothermal actuators was fabricated using SOIMUMPs. Experimental evaluation shows the device is capable of scan in two orthogonal directions and produces a rectangular raster-scan pattern. [ABSTRACT FROM PUBLISHER]
Details
- Language :
- English
- ISBNs :
- 9781457715112
- Database :
- Complementary Index
- Journal :
- 2012 International Conference on Optical MEMS & Nanophotonics
- Publication Type :
- Conference
- Accession number :
- 86583937
- Full Text :
- https://doi.org/10.1109/OMEMS.2012.6318808