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Step-coverage metallisation using selected area evaporation technique for narrow mesa InGaAsP/InP lasers.

Authors :
Matsuyama, T.
Furukawa, C.
Makuta, A.
Kobayashi, H.
Ohtsuka, K.
Tanaka, A.
Kinoshita, J.
Source :
Electronics Letters (Institution of Engineering & Technology); 01/18/1996, Vol. 32 Issue 2, p117-119, 3p
Publication Year :
1996

Details

Language :
English
ISSN :
00135194
Volume :
32
Issue :
2
Database :
Complementary Index
Journal :
Electronics Letters (Institution of Engineering & Technology)
Publication Type :
Academic Journal
Accession number :
86346188
Full Text :
https://doi.org/10.1049/el:19960042