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100 composite beam structure formed by masked-maskless etch of silicon.
- Source :
- Journal of Micromechanics & Microengineering; 1999, Vol. 9 Issue 3, p264-269, 6p
- Publication Year :
- 1999
Details
- Language :
- English
- ISSN :
- 13616439
- Volume :
- 9
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- Journal of Micromechanics & Microengineering
- Publication Type :
- Academic Journal
- Accession number :
- 86119724
- Full Text :
- https://doi.org/10.1088/0960-1317/9/3/307