100 composite beam structure formed by masked-maskless etch of silicon.

Details

Language :

English

ISSN :

13616439

Volume :

9

Issue :

3

Database :

Complementary Index

Journal :

Journal of Micromechanics & Microengineering

Publication Type :

Academic Journal

Accession number :

86119724

Full Text :

https://doi.org/10.1088/0960-1317/9/3/307