Three-dimensional silicon micromachining.

MLA

Azimi, S., et al. “Three-Dimensional Silicon Micromachining.” Journal of Micromechanics & Microengineering, vol. 22, no. 11, Nov. 2012, pp. 1–8. EBSCOhost, https://doi.org/10.1088/0960-1317/22/11/113001.

APA

Azimi, S., Song, J., Dang, Z. Y., Liang, H. D., & Breese, M. B. H. (2012). Three-dimensional silicon micromachining. Journal of Micromechanics & Microengineering, 22(11), 1–8. https://doi.org/10.1088/0960-1317/22/11/113001

Chicago

Azimi, S., J. Song, Z. Y. Dang, H. D. Liang, and M. B. H. Breese. 2012. “Three-Dimensional Silicon Micromachining.” Journal of Micromechanics & Microengineering 22 (11): 1–8. doi:10.1088/0960-1317/22/11/113001.