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Smart Cut™ transfer of 300 mm [110] and (100) Si layers for hybrid orientation technology.
- Source :
- 2004 IEEE International SOI Conference (IEEE Cat. No.04CH37573); 2004, p98-99, 2p
- Publication Year :
- 2004
Details
- Language :
- English
- ISBNs :
- 9780780384972
- Database :
- Complementary Index
- Journal :
- 2004 IEEE International SOI Conference (IEEE Cat. No.04CH37573)
- Publication Type :
- Conference
- Accession number :
- 82110816
- Full Text :
- https://doi.org/10.1109/SOI.2004.1391572