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Spurious vibration suppression by film thickness control for FBAR.
- Source :
- 2008 IEEE Ultrasonics Symposium; 2008, p2193-2196, 4p
- Publication Year :
- 2008
Details
- Language :
- English
- ISBNs :
- 9781424424283
- Database :
- Complementary Index
- Journal :
- 2008 IEEE Ultrasonics Symposium
- Publication Type :
- Conference
- Accession number :
- 82095812
- Full Text :
- https://doi.org/10.1109/ULTSYM.2008.0543