Back to Search
Start Over
SQI-CMOS based single crystal silicon micro-heaters for gas sensors.
- Source :
- 2006 5th IEEE Conference on Sensors; 2007, p460-463, 4p
- Publication Year :
- 2007
Details
- Language :
- English
- ISBNs :
- 9781424403769
- Database :
- Complementary Index
- Journal :
- 2006 5th IEEE Conference on Sensors
- Publication Type :
- Conference
- Accession number :
- 82088961
- Full Text :
- https://doi.org/10.1109/ICSENS.2007.355505