Polishing damages to electrical properties of BLT thin film capacitors fabricated by damascene process of chemical mechanical polishing.

Details

Language :

English

ISBNs :

9781424427444

Database :

Complementary Index

Journal :

2008 17th IEEE International Symposium on the Applications of Ferroelectrics

Publication Type :

Conference

Accession number :

81936864

Full Text :

https://doi.org/10.1109/ISAF.2008.4693730