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Novel technique for nanograin ultra-thin polysilicon film deposition and implantation.
- Source :
- 2003 International Semiconductor Conference. CAS 2003 Proceedings (IEEE Cat. No.03TH8676); 2003, p50-1, 1p
- Publication Year :
- 2003
Details
- Language :
- English
- ISBNs :
- 9780780378216
- Database :
- Complementary Index
- Journal :
- 2003 International Semiconductor Conference. CAS 2003 Proceedings (IEEE Cat. No.03TH8676)
- Publication Type :
- Conference
- Accession number :
- 81920030
- Full Text :
- https://doi.org/10.1109/SMICND.2003.1251342