Fabrication of nanochannels using glass to glass anodic bonding.

Authors :: Kutchoukov, V.G.
Laugere, F.
van der Vlist, W.
Pakula, L.
Garini, Y.
Alkemade, P.F.A.
Bossche, A.
Source :: TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators & Microsystems. Digest of Technical Papers (Cat. No.03TH8664); 2003, p1327-1327, 1p
Publication Year :: 2003

Language :: English
ISBNs :: 9780780377318
Database :: Complementary Index
Journal :: TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators & Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
Publication Type :: Conference
Accession number :: 81891350
Full Text :: https://doi.org/10.1109/SENSOR.2003.1217018