A novel fabrication process for ultra-sharp, high-aspect ratio nano tips using (111) single crystalline silicon.

Details

Language :

English

ISBNs :

9780780377318

Database :

Complementary Index

Journal :

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators & Microsystems. Digest of Technical Papers (Cat. No.03TH8664)

Publication Type :

Conference

Accession number :

81891304

Full Text :

https://doi.org/10.1109/SENSOR.2003.1216972