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The radial bulk annular resonator: towards a 50Ω RF MEMS filter.

Authors :
Bircumshaw, B.
Liu, G.
Takeuchi, H.
Tsu-Jae King
Howe, R.
O'Reilly, O.
Pisano, A.
Source :
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators & Microsystems. Digest of Technical Papers (Cat. No.03TH8664); 2003, p875-875, 1p
Publication Year :
2003

Details

Language :
English
ISBNs :
9780780377318
Database :
Complementary Index
Journal :
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators & Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
Publication Type :
Conference
Accession number :
81891234
Full Text :
https://doi.org/10.1109/SENSOR.2003.1215614