Millinewton force sensor based on low temperature co-fired ceramic (LTCC) technology.

Details

Language :

English

ISBNs :

9780780393455

Database :

Complementary Index

Journal :

2005 PhD Research in Microelectronics & Electronics

Publication Type :

Conference

Accession number :

81876484

Full Text :

https://doi.org/10.1109/RME.2005.1542956