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Mechanical spectrum analyzer in silicon using micromachined accelerometers with time-varying electrostatic feedback.
- Source :
- Proceedings of the 20th IEEE Instrumentation Technology Conference (Cat. No.03CH37412); 2003, p1197-1197, 1p
- Publication Year :
- 2003
Details
- Language :
- English
- ISBNs :
- 9780780377059
- Database :
- Complementary Index
- Journal :
- Proceedings of the 20th IEEE Instrumentation Technology Conference (Cat. No.03CH37412)
- Publication Type :
- Conference
- Accession number :
- 81851028
- Full Text :
- https://doi.org/10.1109/IMTC.2003.1207942