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IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process.
- Source :
- Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498); 2003, p440-440, 1p
- Publication Year :
- 2003
Details
- Language :
- English
- ISBNs :
- 9780780381339
- Database :
- Complementary Index
- Journal :
- Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)
- Publication Type :
- Conference
- Accession number :
- 81836776
- Full Text :
- https://doi.org/10.1109/ICSENS.2003.1278976