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Synthesis and characterization of TiO2 films for deep trench capacitor applications.
- Source :
- ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076); 2000, p147-147, 1p
- Publication Year :
- 2000
Details
- Language :
- English
- ISBNs :
- 9780780359406
- Database :
- Complementary Index
- Journal :
- ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076)
- Publication Type :
- Conference
- Accession number :
- 81811119
- Full Text :
- https://doi.org/10.1109/ISAF.2000.941530