Electrical activation of implanted single crystal germanium substrates.

Authors :: Jasper, C.
Rubin, L.
Lindfors, C.
Jones, K.S.
Jungwoo Oh
Source :: Proceedings of the 14th International Conference on Ion Implantation Technology, 2002; 2002, p548-551, 4p
Publication Year :: 2002

Language :: English
ISBNs :: 9780780371552
Database :: Complementary Index
Journal :: Proceedings of the 14th International Conference on Ion Implantation Technology, 2002
Publication Type :: Conference
Accession number :: 81811043
Full Text :: https://doi.org/10.1109/IIT.2002.1258063