Integrated implant-RTP process monitor using solid phase epitaxy activation.

Authors :: MacKinnon, S.L.
Batinica, G.
Clayton, S.
Csanadi, O.
Source :: Proceedings of the 14th International Conference on Ion Implantation Technology, 2002; 2002, p225-228, 4p
Publication Year :: 2002

Language :: English
ISBNs :: 9780780371552
Database :: Complementary Index
Journal :: Proceedings of the 14th International Conference on Ion Implantation Technology, 2002
Publication Type :: Conference
Accession number :: 81810960
Full Text :: https://doi.org/10.1109/IIT.2002.1257979