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Development of SPDT-structured RF MEMS switch.

Authors :
Uno, Y.
Narise, K.
Masuda, T.
Inoue, K.
Adachi, Y.
Hosoya, K.
Seki, T.
Sato, F.
Source :
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators & Microsystems Conference; 2009, p541-544, 4p
Publication Year :
2009

Details

Language :
English
ISBNs :
9781424441907
Database :
Complementary Index
Journal :
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators & Microsystems Conference
Publication Type :
Conference
Accession number :
81670550
Full Text :
https://doi.org/10.1109/SENSOR.2009.5285381