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Study on a piezoelectric structure based active vibration isolation system for high precision equipment.

Authors :
Xin Luo
Hua-yan Pu
Xue-dong Chen
Yuan-tai Hu
Zhen-hua Zhou
Xiu-lan Bao
Source :
Joint Conference of the 2009 Symposium on Piezoelectricity, Acoustic Waves & Device Applications (SPAWDA) & 2009 China Symposium on Frequency Control Technology,; 2009, p115-115, 1p
Publication Year :
2009

Details

Language :
English
ISBNs :
9781424449507
Database :
Complementary Index
Journal :
Joint Conference of the 2009 Symposium on Piezoelectricity, Acoustic Waves & Device Applications (SPAWDA) & 2009 China Symposium on Frequency Control Technology,
Publication Type :
Conference
Accession number :
81643540
Full Text :
https://doi.org/10.1109/SPAWDA.2009.5428905