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Design of weighting filters with dynamic uncertainty for ultra precision positioning stage.
- Source :
- Joint Conference of the 2009 Symposium on Piezoelectricity, Acoustic Waves & Device Applications (SPAWDA) & 2009 China Symposium on Frequency Control Technology,; 2009, p114-114, 1p
- Publication Year :
- 2009
Details
- Language :
- English
- ISBNs :
- 9781424449507
- Database :
- Complementary Index
- Journal :
- Joint Conference of the 2009 Symposium on Piezoelectricity, Acoustic Waves & Device Applications (SPAWDA) & 2009 China Symposium on Frequency Control Technology,
- Publication Type :
- Conference
- Accession number :
- 81643539
- Full Text :
- https://doi.org/10.1109/SPAWDA.2009.5428904