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Investigation based on NEMS double Si3N4 resonant beams pressure sensor.
- Source :
- Nanoelectronics Conference (INEC), 2010 3rd International; 2010, p553-554, 2p
- Publication Year :
- 2010
Details
- Language :
- English
- ISBNs :
- 9781424435432
- Database :
- Complementary Index
- Journal :
- Nanoelectronics Conference (INEC), 2010 3rd International
- Publication Type :
- Conference
- Accession number :
- 81636335
- Full Text :
- https://doi.org/10.1109/INEC.2010.5425087