High yield dense array of very-high-aspect-ratio micro metal posts by photo-electrochemical etching of silicon and electroplating with vacuum degassing.

Details

Language :

English

ISBNs :

9781424457618

Database :

Complementary Index

Journal :

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)

Publication Type :

Conference

Accession number :

81630434

Full Text :

https://doi.org/10.1109/MEMSYS.2010.5442497