A BE-SOI MEMS for inertial measurement in geophysical applications.

Authors :: Ando?, B.
Baglio, S.
Marletta, V.
Savalli, N.
Trigona, C.
Carbone, D.
Patane?, D.
Rapisarda, S.
Zuccarello, L.
Source :: 2010 IEEE Instrumentation & Measurement Technology Conference (I2MTC); 2010, p1326-1330, 5p
Publication Year :: 2010

Language :: English
ISBNs :: 9781424428328
Database :: Complementary Index
Journal :: 2010 IEEE Instrumentation & Measurement Technology Conference (I2MTC)
Publication Type :: Conference
Accession number :: 81620727
Full Text :: https://doi.org/10.1109/IMTC.2010.5488022