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GaN on patterned silicon (GPS) technique for GaN-based integrated microsensors.

Authors :
Zhenchuan Yang
Ruonan Wang
Deliang Wang
Baoshun Zhang
Chen, K.J.
Kei May Lau
Source :
IEEE International Electron Devices Meeting, 2005. IEDM Technical Digest; 2005, p298-301, 4p
Publication Year :
2005

Details

Language :
English
ISBNs :
9780780392687
Database :
Complementary Index
Journal :
IEEE International Electron Devices Meeting, 2005. IEDM Technical Digest
Publication Type :
Conference
Accession number :
81610596
Full Text :
https://doi.org/10.1109/IEDM.2005.1609333