Damascene gate FinFET SONOS memory implemented on bulk silicon wafer.

MLA

Chang Woo Oh, et al. “Damascene Gate FinFET SONOS Memory Implemented on Bulk Silicon Wafer.” IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004, Jan. 2004, pp. 893–96. EBSCOhost, https://doi.org/10.1109/IEDM.2004.1419324.

APA

Chang Woo Oh, Sung Dae Suk, Yong Kyu Lee, Suk Kang Sung, Jung-Dong Choe, Sung-Young Lee, Dong Uk Choi, Kyoung Hwan Yeo, Min Sang Kim, Sung-Min Kim, Ming Li, Sung Hwan Kim, Eun-Jung Yoon, Dong-Won Kim, Donggun Park, Kinam Kim, & Byung-Il Ryu. (2004). Damascene gate FinFET SONOS memory implemented on bulk silicon wafer. IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004, 893–896. https://doi.org/10.1109/IEDM.2004.1419324

Chicago

Chang Woo Oh, Sung Dae Suk, Yong Kyu Lee, Suk Kang Sung, Jung-Dong Choe, Sung-Young Lee, Dong Uk Choi, et al. 2004. “Damascene Gate FinFET SONOS Memory Implemented on Bulk Silicon Wafer.” IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004, January, 893–96. doi:10.1109/IEDM.2004.1419324.