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A novel electron beam-inspection technique for high-impedance contact plugs.

Authors :
Ominami, Y.
Tsuno, N.
Nozoe, M.
Oh, J.H.
Yoo, H.W.
Lee, J.P.
Mun, D.Y.
Source :
2010 International Symposium on Semiconductor Manufacturing (ISSM); 2010, p1-4, 4p
Publication Year :
2010

Details

Language :
English
ISBNs :
9781457703928
Database :
Complementary Index
Journal :
2010 International Symposium on Semiconductor Manufacturing (ISSM)
Publication Type :
Conference
Accession number :
81561468

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