Heterogeneous integration for optical MEMS.

Details

Language :

English

ISBNs :

9781424453689

Database :

Complementary Index

Journal :

2010 23rd Annual Meeting of the IEEE Photonics Society

Publication Type :

Conference

Accession number :

81543257

Full Text :

https://doi.org/10.1109/PHOTONICS.2010.5698973