Multi-functional annealing using flexibly-shaped-pulse flash lamp annealing (FSP-FLA) for high-k/metal gated CMOS devices.

Details

Language :

English

ISBNs :

9781424433193

Database :

Complementary Index

Journal :

2009 International Workshop on Junction Technology

Publication Type :

Conference

Accession number :

81536130

Full Text :

https://doi.org/10.1109/IWJT.2009.5166232