Impact of angle ranges on thickness resolution in thin film reflectometry.

Details

Language :

English

ISBNs :

9781424442096

Database :

Complementary Index

Journal :

2009 International Symposium on Optomechatronic Technologies

Publication Type :

Conference

Accession number :

81534348

Full Text :

https://doi.org/10.1109/ISOT.2009.5326107