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SOI substrate readiness for 22/20 nm and for fully depleted planar device architectures.
- Source :
- 2009 IEEE International SOI Conference; 2009, p1-4, 4p
- Publication Year :
- 2009
Details
- Language :
- English
- ISBNs :
- 9781424442560
- Database :
- Complementary Index
- Journal :
- 2009 IEEE International SOI Conference
- Publication Type :
- Conference
- Accession number :
- 81480413
- Full Text :
- https://doi.org/10.1109/SOI.2009.5318744