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Some special phenomena observed from in-line sputtered aluminum doped zinc oxide films.

Authors :
Shang-Chou Chang
Gu-Wei Jian
Sheng-Han Huang
To-Sing Li
Tien-Chai Lin
Source :
Microsystems, Packaging, Assembly & Circuits Technology Conference (IMPACT), 2010 5th International; 2010, p1-4, 4p
Publication Year :
2010

Details

Language :
English
ISBNs :
9781424497836
Database :
Complementary Index
Journal :
Microsystems, Packaging, Assembly & Circuits Technology Conference (IMPACT), 2010 5th International
Publication Type :
Conference
Accession number :
81451391
Full Text :
https://doi.org/10.1109/IMPACT.2010.5699513