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Study on Fabrication of Ni mirror chip for space X-ray telescopes utilizing LIGA process.

Authors :
Horade, M.
Sugiyama, S.
Ezoe, Y.
Mitsuishi, I.
Ishizu, K.
Moriyama, T.
Mitsuda, K.
Kinuta, S.
Yamanashi, T.
Ichinosawa, Y.
Source :
2010 International Symposium on Micro-NanoMechatronics & Human Science (MHS); 2010, p263-268, 6p
Publication Year :
2010

Details

Language :
English
ISBNs :
9781424479955
Database :
Complementary Index
Journal :
2010 International Symposium on Micro-NanoMechatronics & Human Science (MHS)
Publication Type :
Conference
Accession number :
81451268
Full Text :
https://doi.org/10.1109/MHS.2010.5669548
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