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Effect of micro-texture of electroplated copper thin-films on their mechanical and electrical reliability.

Authors :
Murata, N.
Tamakawa, K.
Suzuki, K.
Miura, H.
Source :
2009 4th International Microsystems, Packaging, Assembly & Circuits Technology Conference; 2009, p436-439, 4p
Publication Year :
2009

Details

Language :
English
ISBNs :
9781424443413
Database :
Complementary Index
Journal :
2009 4th International Microsystems, Packaging, Assembly & Circuits Technology Conference
Publication Type :
Conference
Accession number :
81411938
Full Text :
https://doi.org/10.1109/IMPACT.2009.5382211