Comparison of different annealing gases effects on the optical emission properties of zinc oxide thin films deposited by radio frequency sputtering.

Details

Language :

English

ISBNs :

9781424435876

Database :

Complementary Index

Journal :

2009 22nd International Vacuum Nanoelectronics Conference

Publication Type :

Conference

Accession number :

81396887

Full Text :

https://doi.org/10.1109/IVNC.2009.5271839