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Backside-activation technique of power device IGBTs by a microsecond-pulsed green laser.
- Source :
- 2009 17th International Conference on Advanced Thermal Processing of Semiconductors; 2009, p1-4, 4p
- Publication Year :
- 2009
Details
- Language :
- English
- ISBNs :
- 9781424438143
- Database :
- Complementary Index
- Journal :
- 2009 17th International Conference on Advanced Thermal Processing of Semiconductors
- Publication Type :
- Conference
- Accession number :
- 81393451
- Full Text :
- https://doi.org/10.1109/RTP.2009.5373455