Application of laser annealing in the EU FP6 project D-DotFET.

Authors :: Nanver, L.K.
Jovanovic, V.
Biasotto, C.
van der Cingel, J.
Milosavljevic, S.
Source :: 2009 17th International Conference on Advanced Thermal Processing of Semiconductors; 2009, p1-7, 7p
Publication Year :: 2009

Language :: English
ISBNs :: 9781424438143
Database :: Complementary Index
Journal :: 2009 17th International Conference on Advanced Thermal Processing of Semiconductors
Publication Type :: Conference
Accession number :: 81393445
Full Text :: https://doi.org/10.1109/RTP.2009.5373443