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A 4.3 mm2 ASIC for a 300 °/s 2-axis capacitive micro-gyroscope.

Authors :
Aaltonen, L.
Kalanti, A.
Pulkkinen, M.
Paavola, M.
Kamarainen, M.
Halonen, K.
Source :
Proceedings of the ESSCIRC, 2010; 2010, p286-289, 4p
Publication Year :
2010

Details

Language :
English
ISBNs :
9781424466627
Database :
Complementary Index
Journal :
Proceedings of the ESSCIRC, 2010
Publication Type :
Conference
Accession number :
81390066
Full Text :
https://doi.org/10.1109/ESSCIRC.2010.5619834