Improvements of Fermi-level pinning and NBTI by fluorinated HfO2-CMOS.

Details

Language :

English

ISBNs :

9781424499977

Database :

Complementary Index

Journal :

2010 IEEE International Conference of Electron Devices & Solid-State Circuits (EDSSC)

Publication Type :

Conference

Accession number :

81370956

Full Text :

https://doi.org/10.1109/EDSSC.2010.5713757