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Control of defects and impurities at GaN and AlGaN surfaces for FET and sensor applications.

Authors :
Kotani, J.
Kaneko, M.
Matsuo, K.
Hashizume, T.
Source :
2006 International Conference on Advanced Semiconductor Devices & Microsystems (9781424403691); 2006, p221-228, 8p
Publication Year :
2006

Details

Language :
English
ISBNs :
9781424403691
Database :
Complementary Index
Journal :
2006 International Conference on Advanced Semiconductor Devices & Microsystems (9781424403691)
Publication Type :
Conference
Accession number :
81304651
Full Text :
https://doi.org/10.1109/ASDAM.2006.331194