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Novel shear strength evaluation of MEMS materials using asymmetrical four-point bending technique.
- Source :
- 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS); 2007, p259-262, 4p
- Publication Year :
- 2007
Details
- Language :
- English
- Database :
- Complementary Index
- Journal :
- 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
- Publication Type :
- Conference
- Accession number :
- 81302813
- Full Text :
- https://doi.org/10.1109/MEMSYS.2007.4433140