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3D Silicon Betavoltaics Microfabricated using a Self-Aligned Process for 5 Milliwatt/CC Average, 5 Year Lifetime Microbatteries.

Authors :
Duggirala, R.
Tin, S.
Lai, A.
Source :
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators & Microsystems Conference; 2007, p279-282, 4p
Publication Year :
2007

Details

Language :
English
ISBNs :
9781424408429
Database :
Complementary Index
Journal :
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators & Microsystems Conference
Publication Type :
Conference
Accession number :
81298673
Full Text :
https://doi.org/10.1109/SENSOR.2007.4300123