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3D Silicon Betavoltaics Microfabricated using a Self-Aligned Process for 5 Milliwatt/CC Average, 5 Year Lifetime Microbatteries.
- Source :
- TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators & Microsystems Conference; 2007, p279-282, 4p
- Publication Year :
- 2007
Details
- Language :
- English
- ISBNs :
- 9781424408429
- Database :
- Complementary Index
- Journal :
- TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators & Microsystems Conference
- Publication Type :
- Conference
- Accession number :
- 81298673
- Full Text :
- https://doi.org/10.1109/SENSOR.2007.4300123