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Profiling of a GaAs structure using the probe method.
- Source :
- Fourth International Conference on Advanced Semiconductor Devices & Microsystem; 2002, p231-234, 4p
- Publication Year :
- 2002
Details
- Language :
- English
- ISBNs :
- 9780780372764
- Database :
- Complementary Index
- Journal :
- Fourth International Conference on Advanced Semiconductor Devices & Microsystem
- Publication Type :
- Conference
- Accession number :
- 81293920
- Full Text :
- https://doi.org/10.1109/ASDAM.2002.1088514