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Profiling of a GaAs structure using the probe method.

Authors :
Kinder, R.
Srnanek, R.
Walachova, J.
Hulenyi, L.
Tlaczala, M.
Sciana, B.
Radziewicz, D.
Source :
Fourth International Conference on Advanced Semiconductor Devices & Microsystem; 2002, p231-234, 4p
Publication Year :
2002

Details

Language :
English
ISBNs :
9780780372764
Database :
Complementary Index
Journal :
Fourth International Conference on Advanced Semiconductor Devices & Microsystem
Publication Type :
Conference
Accession number :
81293920
Full Text :
https://doi.org/10.1109/ASDAM.2002.1088514